Features:

  • Accurately measures thickness when surface is rough (up to DLP 15 µm)

  • Measures highly doped silicon (1E20)

  • Measures thickness up to 1mm Si

  • Fast (< 1 s) and accurate without user calibration (internal reference) or guess of sample thickness

  • Stable operation without isolation

  • Dual spectrometer system using IR and visible light

Applications:

  • Thickness uniformity measurements during preparation of advanced packaged IC, especially large (>300 mm²) die

  • Thickness and gap measurements for MEMS

  • Thickness measurements of glass, adhesive, plastics and semiconductors

  • VarioMetric can be inserted into a Focused Ion Beam for real time thickness feedback​​ in 3rd party systems.

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