Varioscale utilizes an interferometric measurement system to determine the thickness of a sample in real time. Using this technique allows rapid measurement and characterization of a part, necessary in the fast paced environment of the semiconductor industry. The VarioMetric system preforming this measurement and analysis is included in all Varioscale products: VarioEdit, VarioMill, VarioProfile, and VarioMetric. This metrology system combines the ability to determine a wide range of thicknesses and robustness of measurements even on rough and highly doped samples to create a uniquely useful measurement system. The dual spectrometer system employed by all state-of-the-art Varioscale products pushes the measurement capabilities to its current specification of 1000 um down to 500 nm in a single system. 

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The VarioEdit, Mill, and Profile also come with the capability to run a measurement array on the sample over a selected region.  This measurement array will collect a user determined number of points across the sample.  It will then fit these measured values to a polynomial that represents the thickness of the sample over the measured region.  

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Materials other than silicon can be measured as well if the index of refraction of the material is known.

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The modular design and standard component build allow for easy replacement and fast trouble shooting on all VarioMetric systems.