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VarioMetric™
VarioMetric tool in operation
VarioMetric measurement system is a novel optical based solution for non-contact metrology of thick and thin materials. The patent pending VarioMetric method integrates advancements in near-infrared technology and broad-band reflectometry for repeatable thickness measurements of materials, irrespective of their composition or texture.
The heart of the VarioMetric system is a high powered, broadband light source that tunes at a fast rate of 1-10 kHz in small steps of 0.01-0.1 nm. The tunable light source eliminates the resolution and efficiency limitations of the grating-slit combination used in conventional spectroscopic reflectometry.
VarioMetric system uses a low-noise, high gain, fast InGaAs detector instead of the slow, bulky and expensive near-infrared detector array that has low quantum efficiencies. The single detector implementation improves resolution, sensitivity and speed of the system in an inexpensive small footprint.
The VarioMetric system has no moving parts, delivers high power over a small spot size, and has an efficient detection system that enables measurement of thick materials even through slurry or turbid conditions with high accuracy. The rugged VarioMetricTM system design also enables stable performance in demanding manufacturing environment.
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