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VarioEdit™
VarioEdit Laser Assisted Chemical Etching (LACE) Tool
VarioEdit is a laser assisted chemical etching (LACE) system pioneered for backside circuit edit, laser chemical vapor deposition (LCVD) and laser assisted dielectric deposition.
The VarioEdit system is primarily constructed with three building blocks:
- Optical Block—Includes a high power laser, beam steering optics and optomechanical components, viewing system and an in-situ thickness monitoring metrology tool.
- Process Chamber—includes sample holder and gas/vacuum handling equipment/fittings
- Precision X-Y-Z stages
Functional Schematic of System:
Optical turret of the VarioEdit system
The major building blocks are mounted on a vibration isolation platform that is housed in a metal enclosure in compliance with all regulatory and safety requirements.
The VarioEdit operations are fully automated through user-friendly software.